Vadivelu Comedy Technology
Molecular beam epitaxy, kana MBE, inzira nyowani yekukura emhando yepamusoro mafirimu matete ekristaro pakristaro substrates. Mune ekupedzisira-yakakwira vacuum mamiriro, nechitofu chekudziya inoshongedzerwa nemhando dzese dzezvinhu zvinodiwa uye inoburitsa chiutsi, kuburikidza nemakomba anoumbwa mushure mekurovera danda reatomu kana molecular danda, jekiseni rakananga kune yakakodzera tembiricha yeimwe crystal substrate, inodzora molecular beam kusvika. iyo substrate scanning panguva imwe chete, inogona kuita mamorekuru kana maatomu mukristaro alignment layers kuita firimu rakatetepa pane substrate "kukura".
Pakushanda kwakajairika kwemidziyo yeMBE, kuchena kwakanyanya, kuderera kwakadzika uye Ultra-yakachena mvura nitrogen inodiwa kuti irambe ichiendeswa uye yakadzikama ichiendeswa kukamuri yekutonhodza yemidziyo. Kazhinji, tangi rinopa mvura nitrogen ine simba rekubuda riri pakati pe 0.3MPa ne 0.8MPa.Liquid nitrogen pa -196℃ inonyudzwa nyore nyore kuita nitrogen panguva yekufambisa pombi. Kana iyo nitrogen yemvura ine gasi-mvura reshiyo inosvika 1:700 yaiswa gasi mupombi, inotora nzvimbo yakakura yenitrogen yekuyerera uye kuderedza kuyerera kwakajairika pakupera kwepombi yenitrogen yemvura. Pamusoro pezvo, mumvura yekuchengetera nitrogen tank, panogona kunge paine marara asina kucheneswa. Mumvura nitrogen pombi, kuvepo kwemhepo yakanyorova zvakare kunotungamira kune chizvarwa che ice slag. Kana izvi zvakasvibiswa zvikaiswa mumidziyo, zvinokonzeresa kukuvadza kusingafungidzirwe kumidziyo.
Naizvozvo, iyo nitrogen yemvura iri mutangi rekuchengetera kunze inotakurwa kuenda kumidziyo yeMBE mumusangano usina guruva nehunyanzvi hwepamusoro, kugadzikana uye kuchena, uye kuderera kwakadzika, hakuna nitrogen, hakuna tsvina, maawa makumi maviri nemana asina kukanganiswa, hurongwa hwekufambisa hwakadaro. chigadzirwa chakakodzera.
Kufananidza MBE midziyo
Kubva 2005, HL Cryogenic Equipment (HL CRYO) yanga ichikwenenzvera nekuvandudza sisitimu iyi nekushandira pamwe nevagadziri vemidziyo yeMBE yepasi rose. Vagadziri vemidziyo yeMBE, kusanganisira DCA, REBER, vane hukama hwekubatana nekambani yedu. Vagadziri vemidziyo yeMBE, kusanganisira DCA neREBER, vakabatana muhuwandu hwemapurojekiti.
Riber SA inotungamira pasi rose mupi wezvigadzirwa zvemolecular beam epitaxy (MBE) uye masevhisi ane hukama ekutsvagisa semiconductor uye maindasitiri ekushandisa. Iyo Riber MBE mudziyo inogona kuisa zvitete zvakatetepa zvezvinhu pane substrate, ine yakanyanya kudzora. Iyo vacuum midziyo yeHL Cryogenic Equipment (HL CRYO) ine Riber SA Mudziyo mukurusa iRiber 6000 uye diki iCompact 21. Yakanaka uye yakazivikanwa nevatengi.
DCA ndiyo inotungamira pasi rose oxide MBE. Kubva 1993, kurongeka kwakarongeka kwemaitiro oxidation, antioxidant substrate heat uye antioxidant masosi yakaitwa. Nechikonzero ichi, akawanda anotungamira marabhoritari akasarudza DCA oxide tekinoroji. Composite semiconductor MBE masisitimu anoshandiswa pasi rese. Iyo VJ fluid nitrogen inotenderera sisitimu yeHL Cryogenic Equipment (HL CRYO) uye iyo MBE midziyo yemamodhi akawanda eDCA vane ruzivo rwekufananidza mumapurojekiti mazhinji, senge modhi P600, R450, SGC800 nezvimwe.
Performance Table
| Shanghai Institute of Technical Physics, Chinese Academy of Sciences |
| Iyo 11th Institute yeChina Electronics Technology Corporation |
| Institute of Semiconductors, Chinese Academy yeScience |
| Huawei |
| Alibaba DAMO Academy |
| Iyo kambani Powertech Technology Inc. |
| Nhoroondo ye Delta Electronics Inc. |
| Suzhou Everbright Photonics |
Nguva yekutumira: May-26-2021
