Tekinoroji
Molecular beam epitaxy, kana kuti MBE, inzira itsva yekukura mafirimu matete emhando yepamusoro emakristaro pazvigadziko zvekristaro. Mumamiriro ezvinhu evacuum akakwira zvakanyanya, chitofu chinodziya chine mhando dzese dzezvinhu zvinodiwa uye chinoburitsa utsi, kuburikidza nemaburi anoumbwa mushure mekuputira danda reatomu kana molecular beam, inopinzwa zvakananga kune tembiricha yakakodzera ye single crystal substrate, ichidzora molecular beam kune substrate scanning panguva imwe chete, inogona kuita kuti mamorekuru kana maatomu ari mu crystal alignment layers agadzire firimu rakatetepa pa "kukura" kwe substrate.
Kuti michina yeMBE ishande zvakanaka, kuchena kwakanyanya, kumanikidzwa kwakaderera uye nitrogen yemvura yakachena zvakanyanya zvinodiwa kuti iendeswe kunzvimbo inotonhorera michina nguva dzose. Kazhinji, tangi rinopa nitrogen yemvura rine kumanikidzwa kwemhepo kuri pakati pe0.3MPa ne0.8MPa. Nitrogen yemvura pa -196℃ inopfaviswa nyore nyore kuita nitrogen panguva yekufambisa mapaipi. Kana nitrogen yemvura ine chiyero chegasi-mvura cheinenge 1:700 yaiswa gasi mupaipi, inotora nzvimbo yakawanda yekuyerera kwenitrogen yemvura uye inoderedza kuyerera kwakajairika pakupera kwepaipi yenitrogen yemvura. Pamusoro pezvo, mutangi rekuchengetera nitrogen yemvura, panogona kunge paine marara asina kucheneswa. Mupaipi yenitrogen yemvura, kuvapo kwemhepo yakanyorova kuchaitawo kuti pave nechando. Kana tsvina iyi ikaburitswa mumidziyo, ichakonzera kukuvara kusingatarisirwi kumidziyo.
Saka, nitrogen yemvura iri mutangi rekuchengetera zvinhu panze inotakurwa kuenda kumidziyo yeMBE muworkshop isina guruva nekushanda kwakasimba, kugadzikana uye kuchena, uye kumanikidzwa kwakaderera, pasina nitrogen, pasina tsvina, maawa makumi maviri nemana pasina kukanganiswa, sisitimu yekudzora kutakurwa kwakadaro chigadzirwa chakakodzera.
Midziyo yeMBE inoenderana
Kubva mugore ra2005, HL Cryogenic Equipment (HL CRYO) yave ichivandudza nekuvandudza sisitimu iyi uye ichishandira pamwe nevagadziri vemidziyo yeMBE vepasi rose. Vagadziri vemidziyo yeMBE, kusanganisira DCA, REBER, vane hukama hwekushandira pamwe nekambani yedu. Vagadziri vemidziyo yeMBE, kusanganisira DCA neREBER, vakabatana mumapurojekiti akawanda.
Riber SA ikambani inotungamira pasi rose mukupa zvigadzirwa zve molecular beam epitaxy (MBE) uye masevhisi ane chekuita nazvo ekutsvaga macompound semiconductor uye mashandisirwo emaindasitiri. Mudziyo weRiber MBE unogona kuisa zvinhu zvakatetepa pasi pevhu, zvine ma controls akanyanya. Mudziyo wevacuum weHL Cryogenic Equipment (HL CRYO) une Riber SA. Mudziyo mukuru iRiber 6000 uye mudiki iCompact 21. Uri mumamiriro akanaka uye wazivikanwa nevatengi.
DCA ndiyo MBE inotungamira pasi rose ye oxide. Kubva muna 1993, kuvandudzwa kwakarongeka kwemaitiro e oxidation, antioxidant substrate heating uye antioxidant sources kwave kuchiitwa. Nekuda kweizvi, ma laboratori mazhinji anotungamira akasarudza tekinoroji ye DCA oxide. Masisitimu e MBE e semiconductor anoshandiswa pasi rese. VJ liquid nitrogen circulating system ye HL Cryogenic Equipment (HL CRYO) uye MBE michina yemamodheru akawanda e DCA vane ruzivo rwakafanana mumapurojekiti mazhinji, akadai se model P600, R450, SGC800 nezvimwewo.
Tafura Yekushanda
| Shanghai Institute of Technical Physics, Chinese Academy of Sciences |
| Sangano rechi11 reChina Electronics Technology Corporation |
| Institute of Semiconductors, Chinese Academy of Sciences |
| Huawei |
| Chikoro cheDAMO cheAlibaba |
| Powertech Technology Inc. |
| Delta Electronics Inc. |
| Suzhou Everbright Photonics |
Nguva yekutumira: Chivabvu-26-2021
