Mukugadzira ma semiconductor, masisitimu ekuparadzira cryogenic anotarisirwa kuita zvinopfuura kungotamisa nitrogen yemvura kana argon kubva pane imwe nzvimbo kuenda kune imwe. Mvura yacho inofanira kuramba yakagadzikana, yakachena, uye iri muchikamu chimwe chete kusvika pakushandiswa. Kunyangwe huwandu hushoma hwekupisa hunogona kuburitsa gasi remagetsi, kushanduka kwesimba, kana kusvibiswa kwehunyoro kunokanganisa kugadzikana kwemaitiro.

NdosakaPipe yeVacuum Insulatedmasisitimu anowanzo shandiswa mukugadzira zvinhu zve semiconductor pachinzvimbo chemapombi emazuva ano anoputirwa nefuro. Kana akabatanidzwa nechinhu chinodzorwa zvakanakaSisitimu yeDynamic Vacuum Pombi, kudonha kwekupisa kwese kunogona kuramba kuri pasi pe3 W/m ukuwo vacuum ichiramba yakagadzikana kwenguva refu mumutsetse wese wekutamisa.

Pakushandisa semiconductor, vacuum insulation haifanirwe kuonekwa se passive layer yakatenderedza pombi. Isystem inoshanda yekupisa inoda kushanda kwe vacuum kunoyerwa uye kugara kwenguva refu. Munzvimbo dzekugadzira machip dzakanyatsogadzirwa, kunyangwe kuwedzera kudiki kwekushisa kwemvura kunogona kutungamira kumamiriro ekuyerera kwezvikamu zviviri izvo zvinokanganisa macircuit ekutonhodza, masisitimu ekuchenesa, kana michina yekudzora mashandiro.

Nei Kupisa Kuchikosha muCryogenic Semiconductor Systems

Mutsetse wega wega wekutamisa cryogenic unokanganiswa nemhando nhatu huru dzekutamisa kupisa:

• mwaranzi munzvimbo ye annular
• kuyerera kwegasi kunokonzerwa nemamorekuru akasara
• kufambisa kwakasimba kuburikidza nezvitsigiro uye ma spacers

Mune yakagadzirwa zvakanakaPipe yeVacuum Insulated, kumanikidzwa kwe annular kunowanzo deredzwa pasi pe 1 × 10⁻⁴ Pa. Padanho iroro re vacuum, mamorekuru egasi asara ane nzira yakasununguka yakakura zvakanyanya kupfuura annular gap, izvo zvinoderedza zvakanyanya kufambiswa kwekupisa kwegasi.

Kutamiswa kwekupisa kwemwaranzi kunodzorwa uchishandisa multi-layer insulation (MLI). Kutamiswa uku kunosanganisira zvidimbu zve reflective foil uye low-conductivity spacer material. Nekuwanda kwezvikamu kwakakodzera uye nzira yekuisa, radiative heat flux inogona kuderedzwa kusvika kuma watts mashoma chete pa square metre.

Nzira yasara yekupisa inobva zvakanyanya pakutsigira kwemakanika. Kuti kuderedze izvi, zvinhu zvinofambisa mhepo zvishoma zvakaita seG-10 fiberglass kana Torlon® zvinowanzo shandiswa. Zvishandiso izvi zvichiri kuda simba rakakwana remakanika kuti zvikwanise kutsungirira kudzikira kwekupisa, kudedera, uye kudengenyeka kwenyika panguva yekushanda.

Mukufamba kwenguva refu, musiyano uripo pakati pe vacuum insulation ne foam insulation unonyanya kuoneka. Sisitimu ye vacuum inochengetwa zvakanaka inogona kuchengetedza kushanda kwekupisa kwakasimba kwemakore mazhinji, nepo foam insulation ichitora hunyoro kubva mumhepo zvishoma nezvishoma. Kana hunyoro hwapinda mu insulation structure uye hwaoma, kushanda kwekupisa kunowanzo derera nekufamba kwenguva.

Muma semiconductor LN₂ distribution systems anoshanda,mapaipi anoputirwa ne vacuuminogona kuderedza kufashaira kwemvura zvakanyanya kana tichienzanisa nemitsetse yechinyakare inoputirwa nefuro, kunyanya pakufamba kwenguva refu kunze kana kuti pakushandisa main headers nguva dzose.

Sisitimu yeDynamic Vacuum Pombi

Dambudziko rimwe chete nemajaketi evacuum asingachinji nderekuti kunaka kwevacuum kunogona kudzikira zvishoma nezvishoma nekufamba kwemakore nekuda kwekubuda kwegasi, kupinda kwehelium, kana kubuda kwemvura ne microscopic.

Kuti tigadzirise izvi, dhayamita hombePipe yeVacuum Insulatedmasisitimu anogona kuve neSisitimu yeDynamic Vacuum PombiSisitimu iyi inowanzo sanganisira turbomolecular kana scroll pump iyo inodzoreredza annular vacuum kuti iite sezvayakanga yakaita pakutanga.

Mwero wevacuum unoongororwa nguva dzose uchishandisa magauge ecold-cathode. Pombi iyi inoshanda chete kana kumanikidzwa kwacho kwakwira kupfuura nzvimbo yakatarwa, saka zvinodiwa pakushandisa simba uye kugadzirisa zvinoramba zvakaderera.

Mune imwe purojekiti yekuvandudza nzvimbo dze semiconductor muHsinchu, Taiwan, sisitimu yekupomba vacuum inofambiswa zvakanaka yakabvumira musoro weLN₂ wekare kuti udzore kushanda kwekupisa pedyo nemamiriro ayo ekutanga pasina kudzima tambo yekugadzira. Kune mapurojekiti matsva, kuchengetedza vacuum active kunoitawo kuti vashandisi vave nechivimbo chiri nani mukugadzikana kwenguva refu kwekudzivirira mukati mehupenyu hwese hwesystem.

Zvishandiso uye Kugadzira Sisitimu

Pakushandisa semiconductor uye ultra-high-purity, pombi yemukati inowanzogadzirwa nesimbi isingatsvedzi ye304L kana 316L. Nzvimbo dzemukati dzinocheneswa, dzinocheneswa, uye dzinoshandiswa kuti dzisvike pazvinodiwa zvekuchenesa okisijeni uye kuderedza njodzi yekusvibiswa.

Bhachi rekunze rinogona kushandisa simbi yakapendwa nekabhoni kana simbi isina ngura zvichienderana nenzvimbo yekuisa. Munzvimbo dziri pedyo nemakamuri akachena, majachi ekunze asina ngura anowanzo shandiswa kudzivirira ngura kana kusvibiswa pamusoro.

Kudzikira kwekupisa kunofanirawo kufungwa nokungwarira. Mutsetse wekutamisa weLN₂ unogona kudzikira anenge 2.5–3 mm pamita pakati pekupisa kwemhepo nekupisa kwekushanda. Kuti zvipindire kufamba uku, ma "bellow-type expansion compensators" anowanzoiswa panzvimbo dzakatarwa dze "anchor" mukati me network yepombi.

Kana zvichidikanwa kufamba kana kuchinjika,Hosipaipi Inochinjika yeVacuumMagungano anowanzo shandiswa. Nzvimbo dzakajairika dzinosanganisira kubatanidza matangi, kubatana kwemidziyo, matavi akawanda, uye ma skid ekufambisa.

Mapaipi aya anochinjika anoshandisa core yemukati yakakombama pamwe chete nejaketi revacuum uye chimiro cheMLI chakafanana nepaipi yevacuum yakasimba. Mapaipi akagadzirwa zvakanaka anogona kuchengetedza kusimba kwevacuum mushure mekudzokororwa kwekupisa kwecryogenic ukuwo achidzivirirawo kugadzirwa kwechando chekunze kunowanzoitika pamapaipi asina insulation.

Mavharuvhu Akaputirwa neVacuumuyeZvikamu Zvinoparadzanisa

Kugadzirisa kubuda kwemvura mupombi hakungogumiri pazvikamu zvepombi dzakatwasuka.zvinoparadzanisa zvikamuzvinoitawo basa guru mukuchengetedza mamiriro emvura akasimba.

A Vharuvhu Yakaputirwa neVacuuminowanzo shandisa bhoneti refu uye muviri wakaputirwa ne vacuum kuti ichengetedze nzvimbo dzakakosha dzekuvhara kure nekupisa kwakaderera zvakanyanya. Izvi zvinobatsira kudzivirira kuomeswa nechando kwakatenderedza kurongedza tsinde uye kuderedza kunyorova kusingadiwe mukati mechivako chevharuvhu.

Pasina vacuum insulation, mavharuvhu anogona kuva nzvimbo dzinopisa zvakanyanya mukati mesystem. Mukushanda kwemvura cryogenic, izvi zvinogona kugadzira pombi dzemhepo dziri munzvimbo imwe chete, mamiriro ekuyerera asina kugadzikana, kana zviitiko zvehammer yemvura.

Kune masisitimu ekugadzirisa ma semiconductor, mavharuvhu eglobe e extended-bonnet nemavharuvhu ebhora epamusoro anowanzo shandiswa zvichienderana nezvinodiwa neASME B31.3 ne EN 13480.

A Muchina weVacuum Insulated Phase Separatorinoshandiswa kubvisa gasi remagetsi risati rapinda mumidziyo inopinza mvura iri pasi pemvura. Mukushandiswa kwe semiconductor, kuyerera kwematanho maviri kusina kugadzikana kunogona kukonzera kutenderera kwekumanikidza kwakakura zvakakwana kuti kutange maalarm ekushanda kana kukiya michina.

Madhizaini mazhinji e separator anoshandisa tangential inlet pamwe chete ne internal demister structure kuti ivandudze kushanda zvakanaka kwekuparadzanisa kwe vapor-liquid. Mumapurojekiti mazhinji, separator inosanganiswa ne Mini Tank yakaiswa pedyo ne process floor. Mini tank inoshanda se local buffer volume iyo inobatsira kudzikamisa kushanduka kwezvinodiwa kwenguva pfupi pasina kuwedzera kupisa kwakanyanya.

Muenzaniso wePurojekiti yeSemiconductor

Chirongwa chekuwedzera nzvimbo yeDRAM muSouth Korea chaida network itsva yekuparadzira LN₂ inopa michina yekuyedza inotonhorera mumvura uye maturusi ekugadzirisa wafer.

Kuiswa kwacho kwaisanganisira mapipe eVacuum Insulated akareba mamita angangoita 180 akabatana nematavi ezvishandiso akawanda kuburikidza neVacuum Insulated Flexible Hose assemblies. Vacuum Insulated Phase Separator ne2 m³ Mini Tank zvakaiswa pedyo nenzvimbo yekuchengetera zvinhu zvakawanda.

Dynamic Vacuum Pomp System yaichengetedza kumanikidzwa kwe annular kuri pasi pe 5×10⁻⁶ mbar pamitsetse mikuru ye 6-inch transfer.

Munguva yekuiswa kwemagetsi, kuyerwa kwekubuda kwekupisa pamusoro pemusoro wekutanga kwaive neavhareji yeinenge 1.3 W/m pasi pemamiriro ekushanda akagadzikana. Mushure megore rimwe rekushanda nguva dzose, nguva nenguva yekudzoreredza vacuum cycles yakachengetedza mashandiro ekudzivirira kupisa ari pedyo nemamiriro ekutanga.

Zvichienzaniswa nepfungwa yekare yekushandiswa kwefuro, nzvimbo iyi yakashuma kurasikirwa kwakaderera kwenitrogen yemvura uye kugadzikana kwekushanda kwayo kuri nani. Zvinyorwa zvehurongwa hazvina kuratidzawo kusvibiswa kwakabatana nehunyoro kwakabatana nekuderera kwekudzivirira.

Mashandisirwo

Masisitimu ekufambisa cryogenic anoputirwa ne vacuum anoshandiswa zvakanyanya mukugadzira semiconductor, LNG infrastructure, kugoverwa kwegasi remumaindasitiri, uye kushandiswa kwehydrogen yemvura.

Kunyangwe nzvimbo dzekushanda dzichisiyana, chinangwa cheinjiniya chinoramba chakafanana:

• chengetedza kugadzikana kwevacuum
• kuderedza kupisa
• kuchengetedza kugadzikana kwechikamu panguva yese yekutamisa

Kugadzirwa kwesystem kunowanzo tevedzera zviyero zvepasi rose zvakaita seASME B31.3, EN 13480, uye ISO 21029 zvichienderana nehuwandu hweprojekiti uye zvinodiwa munharaunda.

Kune zvivako zve semiconductor, mashandiro e cryogenic distribution system anokanganisa zvakananga kushanda zvakanaka, kushandiswa kwemvura, uye kuvimbika kwemaitiro kwenguva refu. Nekuda kweizvozvo, mapaipi, mavharuvhu, ma separators, uye masisitimu ekuchengetedza vacuum anofanirwa kugadzirwa seimwe sisitimu yekupisa yakabatanidzwa pane zvikamu zvakazvimiririra.

At HL Cryogenics, tinoshanda nemakambani eEPC, makambani egasi, uye nzvimbo dze semiconductor kugadzira mhinduro dze cryogenic transfer zvichienderana nemamiriro chaiwo ekushanda, zvinangwa zvekupisa, uye zvinodiwa pakuiswa pane kugadzirisa katalogi yakajairwa.

Kana uri kuronga purojekiti itsva yekugadzira semiconductor fab kana kuvandudza network iripo yekuparadzira LN₂, timu yedu yeinjiniya inogona kubatsira kuongorora mashandiro ekupisa, nzira yekubvisa mhepo, uye magadzirirwo esystem kuti ishande kwenguva refu.